DEVELOPING FUNCTIONAL NANOSTRUCTURES
A novel fabrication technique for integrated sensors is the focus of research by Leonid Tsybeskov, associate professor of electrical and computer engineering. With funding from the National Science Foundation and the Semiconductor Research Corporation, his research team fabricates single crystal, nanometer-thick suspended membranes with the goal of developing prototypes of integrated, ultra-high sensitivity pressure sensors and flow meters. Another important application of this work is the development of integrated 3-D silicon-germanium nanostructures for photonic-on-a chip systems. The team works in collaboration with Hewlett-Packard Corporation and the National Research Council of Canada.